Optical and Mass Spectrometric Measurements of Plasma Diagnostics in Low Frequency, High Density, Remote Source O2/Ar, NF3/Ar and CH4/CO2 Dry Reforming Plasmas
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Optical and Mass Spectrometric Measurements of Plasma Diagnostics in Low Frequency, High Density, Remote Source O2/Ar, NF3/Ar and CH4/CO2 Dry Reforming Plasmas